07
Machines and machine tools for microelectronics, medical
equipment techniques, biotechnology, microsystem techniques,
semiconductor technology, nanotechnology, wafer bonding,
lithography equipment; machines for manufacturing electronic
components and optical and technical devices; precision
machines as well as spare parts for the same;
self-regulating pumps
09
Scientific apparatus and instruments for microelectronics,
for medical equipment techniques, biotechnology, microsystem
techniques, semiconductor and nanotechnology; surveying
devices, electric, photographic, optical, measuring,
signalling, and monitoring devices, in particular for
precision systems in the semiconductor technology, in
microelectronics, in medical equipment techniques,
biotechnology, microsystem techniques, and nanotechnology;
apparatus for chemical analysis; chips, integrated circuits;
computer operation programs; peripheral equipment for
computer; data processing units, data processing devices and
computer; computer software; diagnosis devices in bio-chip
format, namely oligonucleotide-arrays, miniaturized
immunologic test-arrays, substance libraries, combinatorial
substance libraries on chip surfaces for scientific
purposes; electric systems for remote controlled industrial
operational processes; computer systems for manufacturing
plants for microelectronics, medical equipment techniques,
biotechnology, microsystem techniques, and nanotechnology;
protective masks and filters therefor for use with
photographic and photolithographic equipment and
photographic film processing; devices for
telecommunications; telegraphic transmitting apparatus;
telecopying devices; telephones; semiconductors; capillary
tubes; monitoring devices (electric); couplers (data
processing equipment); special furniture for laboratories;
laser (for non-medical purposes); reading devices (data
processing); measuring instruments; measuring devices;
material testing instruments and machines; diaphragms for
scientific apparatus; optical apparatus and instruments;
photographic apparatus and instruments; physical and
chemical laboratory apparatus and instruments; precision
measuring devices; projectors; protective clothing, in
particular for clean-rooms; silicon wafers; probes for
scientific purposes; spectroscopes; finders for photographic
equipment
42
Scientific and technological services and research and
design relating thereto; industrial analysis, industrial
research and industrial design services; quality control and
authentication services; design and development of computer
hardware and software; scientific laboratory services;
engineering; computer programming; engineering and
scientific services; evaluations, estimates, research and
reports in the scientific and technological fields;
technological consultancy; software as a service (SaaS);
platform as a service (PaaS); conducting technical project
studies; material testing; calibration; construction
drafting; research and development of new products for
others; research in the field of physics; mechanical
research; engineering services; development of precision
systems and devices for the semiconductor technology;
development of devices for microsystem techniques,
microelectronics, medical techniques, biotechnology,
telecommunication, wafer bonding, lithography equipment;
providing systems technology solutions for sensorics and
diagnostics, in particular of biology and medicine; research
work in the field of bio-technology; research work in the
field of microsystem technology, nanotechnology, wafer
bonding, lithography equipment; research work in the field
of bio-sensorics and chemical sensorics; technological
consulting for third parties concerning handling production
plants and process equipment; microsystem technology and
nanotechnology services; providing temporary use of
non-downloadable computer programs for data processing
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