07
Machines and installations composed thereof for the
generation of vacuum or material treatment; accessories and
spare parts for the machines of vacuum generation or
material treatment, particularly vacuum pumps (machines),
regulating and control mechanisms for vacuum pumps
09
Apparatus and instruments for physics or chemistry, namely,
electrical apparatus and installations composed thereof for
treatment of surfaces using a vacuum process or a plasma
process; apparatus and instruments for physics or chemistry,
namely, devices and apparatus for coating or treatment of
surfaces using a vacuum process or a plasma process, in
particular for vapour deposition, sputtering, ion
implanting, and glow discharge supported deposition of solid
layers from the gaseous phase; parts of apparatus and
instruments for physics or chemistry, namely of devices and
apparatus for coating or treatment of surfaces using a
vacuum process or a plasma process, in particular vacuum
chambers, electron emitters, generator chambers,
arrangements of cathodes or crucibles, electron beam
physical vapor deposition systems, resistance heated
vaporizers, apparatus and instruments for physics or
chemistry for supplying vacuum chambers with process gas,
electrical monitoring units, electrical control apparatus;
material testing instruments and machines; electronic
publications, downloadable; magnetic data media; compact
discs (read-only memory)
40
Material treatment
42
Scientific and technological services and research and
design relating thereto; scientific and industrial research;
scientific surveys; consultancy in the field of scientific
and technical research; technical and scientific surveying;
technical and scientific project studies; material testing;
quality audits; technical research and development for
others concerning new products; technical research;
mechanical research; physics research; chemical research;
engineering; physics (research); chemist services
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