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Machine tools; motors and engines [except for land vehicles]; machine coupling and transmission components [except for land vehicles]; automatic electronic parts mounting apparatus for automatically mounting electronic parts such as IC chips on printed circuit boards; automatic electronic parts insertion machines for putting electronic parts in printed circuit boards; dispensers for printed boards; adhesive curing equipment for printed boards; soldering machines for printed boards; semiconductor manufacturing apparatus; plasma surface treatment apparatus for semiconductor substrates; plasma cleaning apparatus for semiconductor substrates; surface adhesion improving treatment apparatus using plasma for semiconductor substrates, metal, glass, rubber, synthetic resin, semiconductor electronic parts, eyeglass lenses, optical instrument parts, automobile parts, cutting tools and solar cells; hydrophilic nature improving treatment apparatus using plasma for semiconductor substrates, metal, glass, rubber, synthetic resin, semiconductor electronic parts, eyeglass lenses, optical instrument parts, automobile parts, cutting tools and solar cells; plasma cleaning apparatus for semiconductor substrates, metal, glass, rubber, synthetic resin, semiconductor electronic parts, eyeglass lenses, optical instrument parts, automobile parts, cutting tools and solar cells; oxide film removing apparatus using plasma for semiconductor substrates, metal, semiconductor electronic parts and metallic automobile parts; plasma etching apparatus for semiconductor materials; residue removing apparatus using plasma for use in semiconductor substrate manufacturing process; metallic surface hardening treatment apparatus using plasma for improving abrasion resistance of cutting tools; surface finishing treatment apparatus using plasma for easier forming of prosthesis coating over the ceramic material surfaces of junctions of artificial bones or joints during their manufacturing process; automated small parts assembly equipment; automated assembly machinery for fuel cells, solar cells and other secondary batteries; automated assembly instruments for metallic parts, automobile parts, electric parts and other mechanical parts; electronic circuit card assembly equipment; electronic circuit assembly equipment; automated assembly equipment for medical instruments; industrial robots