1
Chemicals used in industry, science and photography; Semiconductor materials, in particular silicon, ultra-pure silicon and silanes; Chemicals for the surface coating of metals, semi-conductor materials, glass, Plastics and Polymers,In particular for vacuum-based coating, sputtering, PVD (physical vapour deposition) coating and CVD (chemical vapour deposition) coating
6
Common metals and their alloys; Iron goods and metal goods, included in class 6, including iron goods and metal goods coated using a vacuum-based coating process, and iron goods and metal goods coated by means of sputtering, PVD (physical vapour deposition) coating and CVD (chemical vapour deposition) coating
7
Machines and installations for coating materials, in particular for the vacuum-based coating of materials; Machines and installations for sputtering, for PVD (physical vapour deposition) coating and CVD (chemical vapour deposition) coating; Machines and installations for coating flat substrates in the circuit board industry and photovoltaic industry, in particular for coating metals, semiconductor materials, glass and plastics; Vacuum pumps and Vacuum generators, in particular gas transfer vacuum pumps, positive displacement vacuum pumps, diaphragm vacuum pumps, reciprocating vacuum pumps,Vane-type vacuum pumps, roots vacuum pumps, kinetic vacuum pumps, motivating fluid vacuum pumps, diffusion vacuum pumps, gas-binding vacuum pumps, adsorption vacuum pumps, getter vacuum pumps, cryo-vacuum pumps; Machine parts, parts and spare parts of all aforementioned goods,In particular valves, Filters,Suction devices, Separators and Connector components