09
Computer software and hardware for use in sensing,
monitoring, and analyzing various solid, liquid and gaseous
contaminants; software and hardware for counting contaminant
particles; software and hardware for monitoring polishing
and planarization slurries; software and hardware for
continuous monitoring of hydrogen peroxide concentrations;
cleanliness testing stations comprised in part of computer
hardware, computer software, or computer peripherals
37
Installation, maintenance and repair services, namely,
installation, maintenance and repair of computer hardware
for: sensing, monitoring, and analyzing various solid,
liquid and gaseous contaminants
41
Education and training services, namely, offering training
programs and seminars tailored to the operation,
maintenance, repair and calibration of systems for: sensing,
monitoring, and analyzing various solid, liquid and gaseous
contaminants
42
Installation, maintenance and repair services, namely,
installation, maintenance and repair of computer software
for: sensing, monitoring, and analyzing various solid,
liquid and gaseous contaminants; sensing, monitoring, and
analyzing hydrogen peroxide concentrations; counting
contaminant particles; monitoring polishing and
planarization slurries; and cleanliness testing; development
of computer programs for manufacturing process
characterization and design relating to contaminants,
cleanliness, and hydrogen peroxide concentrations;
development of computer programs for trouble shooting of
manufacturing processes relating to contaminants,
cleanliness, and hydrogen peroxide concentrations;
development of computer programs for design of product
validity procedures, testing methods and techniques related
to contaminants, cleanliness, and hydrogen peroxide
concentrations; development of computer programs for
manufacturing site surveys related to contaminants,
cleanliness, and hydrogen peroxide concentrations;
development of computer programs for on-site testing for
contaminants, cleanliness, and hydrogen peroxide
concentrations; development of computer programs for
microcontamination testing services; development of computer
programs for laboratory testing for contaminants,
cleanliness and hydrogen peroxide concentrations; sensing,
monitoring, and analyzing hydrogen peroxide concentrations;
counting contaminant particles; monitoring polishing and
planarization slurries; and cleanliness testing; sensing,
monitoring, and analyzing hydrogen peroxide concentrations;
counting contaminant particles; monitoring polishing and
planarization slurries; and cleanliness testing
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