7
Plasma enhanced chemical vapor deposition (CVD) process chambers, namely, machines for the application of coatings to metal articles, glass articles, or plastic articles applied under vacuum using plasma assisted chemical vapor deposition process; plasma sources, namely, inductively coupled and atmospheric plasma sources in the nature of machines for the application of thin films for use in the manufacture of photovoltaic cells and modules
9
Photovoltaic cells and modules; thin film transistors; and integrated circuits
42
Scientific research, design, and development in the fields of photovoltaic cells and modules, plasma sources, namely, inductively coupled and atmospheric plasma sources in the nature of machines for the application of thin films for use in the manufacture of photovoltaic cells and modules, plasma enhanced chemical vapor deposition (CVD) process chambers, namely, machines for the application of coatings to metal articles, glass articles, or plastic articles applied under vacuum using plasma assisted chemical vapor deposition process, thin film transistors, and integrated circuits for scientific and technological applications
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