7
Wet processing equipment used for semiconductor manufacturing, namely, electrodeposition and electroless plating tools; vapor deposition processing equipment used for semiconductor manufacturing, namely, chemical vapor and atomic layer deposition tools
9
Electronic components being parts for solar installations, namely, electronic sensors for measuring solar radiation and solar cells; apparatus for converting the chemical energy into the electrical energy, namely, fuel cells; apparatus for storage of the energy, namely, batteries, electric cells; printed wiring boards, liquid crystal display panels and flat panel display screens; apparatus for converting solar radiation to electrical energy, namely, photovoltaic solar modules and photovoltaic solar thermal hybrid modules; metrology equipment for process control in semiconductor manufacturing, namely, titration, voltammetry, chromatography, and spectroscopy
11
Electronic components being parts for solar installations, namely, solar collectors and solar heat collection panels
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