4
Oils, namely mineral oils, silicone oils, synthetic oils and perfluoropolyether oils; lubricants; silicon vacuum sealers (greases); industrial greases
6
Metal flanges; flange fittings; metal clamps other than tools; commercial containers of metal for transporting semiconductor processing equipment
7
Vacuum apparatus and vacuum machines all included in class 7; vacuum pumps; oil sealed pumps; rotary vane pumps; oil sealed rotary pumps; oil sealed piston pumps; booster pumps; scroll pumps; dry pumps; dry vacuum pumps; liquid ring vacuum pumps; industrial dry pumps; diaphragm pumps; jet pumps; turbomolecular pumps; compound molecular pumps; regenerative pumps; vapour pumps; diffusion pumps; chemical pumps; chemical dry pumps; chemical dry vacuum pumps; chemical pumping systems; vacuum shelf dryers; steam ejector vacuum machines and equipment; exhaust gas management apparatus and equipment; pump controllers; valves (being parts of machine); valve controllers (being parts of machine); chemical blending apparatus and delivery system and point of use chemical blending apparatus and delivery system, all being machines; apparatus and system for blending and distribution of chemical mechanical polishing slurries, all being machines; devices for coating substrates; integrated gas pumping apparatus; water cooled traps; heated traps; filter traps; parts and fittings for all the aforesaid goods
9
Scientific apparatus, spectrograph apparatus, mass spectrometers, instruments and apparatus for use in testing, control, detection, monitoring and the analysis of materials in scientific and industrial operations, pressure gauges; pressure regulators; apparatus and instruments all for detecting fluid leaks; ionisation gauges, vacuum gauges, convection gauges; pirani gauges; penning gauges; ion gauges; magnetron gauges; inverted magnetron gauges; wide range gauges; thermocouple gauges; strain gauges; transducers; controllers for gauges; capsule dial gauges; gas sensors; moisture sensors; calibration apparatus, instruments and equipment; accelerated ion devices other than for treating air; apparatus for thin-film deposition; vacuum deposition technology apparatus, instruments and equipment; vapour deposition apparatus, instruments and equipment; electron beam deposition apparatus, instruments and equipment; electron beam furnace equipment, electron beam evaporation equipment, electron beam annealing equipment, electron beam surface conditioning equipment sputtering apparatus, instruments and equipment; electric valves; electronic valves; electrical power supplies; parts and fittings for all the aforesaid goods; computer software for monitoring system status and providing data relating to vacuum, exhaust abatement, chemical use and gas use, relating to the manufacture of semiconductors and integrated circuits; computer software for designing and configuring gas, chemical, vacuum and exhaust management systems; on line particle size analytical device for use in chemical mechanical polishing system; apparatus for controlling the temperature of pipework, namely a temperature control device connected to a heating or cooling device surrounding pipework and an insulating device fitted around the pipework and heating/cooling device to minimise heat loss
11
Installations and apparatus for refrigerating, cooling and chilling; installations and apparatus for the treatment, purification and disposal of solid, liquid, and gaseous matter; water purification units; water treatment units; installations and apparatus for igniting, heating, burning and scrubbing gas; installations and apparatus for cleaning exhaust gases from the semiconductor industry; gas abatement apparatus; integrated abatement apparatus; gas scrubbing apparatus; wet scrubbers; gas reactors; gas recovery apparatus; gas separating apparatus; de-aerating apparatus, namely apparatus for removing gases from a liquid; and parts and fittings for all the aforesaid goods
37
Repair and maintenance of semiconductor processing equipment, exhaust gas management systems, chemical distribution systems, water treatment systems, heat exchangers, chillers, vacuum apparatus and vacuum pumps and parts and fittings therefor; refurbishment of semiconductor processing equipment
41
Consultancy and arranging of seminars in the field of vacuum and exhaust management engineering; training services for the design, installation, modification, calibration, operation, application and maintenance of apparatus for the provision of gases and gas mixtures, chemicals, vacuum and/or exhaust management in the manufacture of semiconductors and similar devices
42
Technical consultancy, technical advisory and design services for the design, installation, modification, calibration, operation, application and maintenance of apparatus for the provision of gases and gas mixtures, chemicals, vacuum and/or exhaust management in the manufacture of semiconductors and similar devices