07
Machines for processing semiconductors, solar cells, fibers
and other substrates; machines for etching semiconductor
surfaces; machines for vaporizing or coating semiconductor
surfaces, under vacuum [so-called CVD method] or
atmospherically or under the influence of plasma; machines
for transporting goods [atmospheric or subatmospheric or
under a predefined gas atmosphere]; machines for
plasma-based coatings; atomic layer deposition machines;
mechanical installations and devices for thermal treatment
or manufacturing processes, namely coating installations,
annealing installations, installations for vacuum soldering,
installations for chemical vapor deposition [CVD
installations]; machines for thermal layer growth and
thermal layer transformations
09
Hardware and software for operation of semiconductor
manufacturing machines and heating installations (included
in this class)
11
Baking ovens; vacuum furnaces; laminating ovens; machines
for thermal, dry and wet-chemical exhaust gas and gas
cleaning; machines for the thermal processing of
semiconductors, solar cells, fibers and other substrates and
their thermal processing under vacuum; annealing
installations consisting of furnaces being parts of machines
for the thermal treatment of surfaces and objects; diffusion
furnaces, continuous furnaces, coating furnaces being parts
of machines for the thermal treatment of surfaces and
objects; installations for treating and cleaning gases and
exhaust gases, namely exhaust gas cleaning installations;
diffusion furnaces, continuous furnaces, baking furnaces
being parts of systems and devices for thermal treatment or
manufacturing processes; radiation- based rapid heating
systems consisting of heating apparatus; furnaces for
thermal film growth and thermal film transformations
37
Building construction, repair, installation and maintenance
of machines and machine tools and individual parts therefor,
all for the manufacture and processing of solar cells
[turnkey solutions], semiconductors, fibers and raw
materials therefor; assembly services relating to
installation of semiconductor devices, atmospheric as well
as sub-atmospheric
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