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Computer software; computer hardware and software for the
collection of data; computer hardware for remotely accessing
and transmitting data; computer software for monitoring
system status and supply of vacuum-related data, exhaust
reduction, chemical use and gas use, related to the
manufacture of semiconductors and integrated circuits;
computer software for design and configuration of gas,
chemical, vacuum and exhaust management systems, including
data on inlet pressure, engine speed, power consumption, oil
temperature, discharge temperature or inlet pressure;
computer software for remotely accessing and controlling a
computer system; computer software for monitoring status,
operation, function, environment, failures and errors of
pumps, vacuum pumps, dry vacuum pumps, screw vacuum pumps,
dry screw vacuum pumps, claw vacuum pumps, dry claw vacuum
pumps, roots vacuum pumps, dry roots vacuum pumps, dry
roots/claw vacuum pumps, scroll vacuum pumps, dry scroll
vacuum pumps, piston vacuum pumps, oil sealed vacuum pumps,
oil flooded vacuum pumps, diffusion vacuum pumps,
turbomolecular vacuum pumps, dry turbomolecular vacuum
pumps; computer software for recording and display of data
relating to status, operation, function, environment,
failures and/or errors of pumps, vacuum pumps, dry vacuum
pumps, screw vacuum pumps, dry screw vacuum pumps, claw
vacuum pumps, dry claw vacuum pumps, roots vacuum pumps, dry
roots vacuum pumps, dry roots/claw vacuum pumps, scroll
vacuum pumps, dry scroll vacuum pumps, piston vacuum pumps,
oil sealed vacuum pumps, oil flooded vacuum pumps, diffusion
vacuum pumps, turbomolecular vacuum pumps, dry
turbomolecular vacuum pumps; computer software for the
configuration of pumps, vacuum pumps, dry vacuum pumps,
screw vacuum pumps, dry screw vacuum pumps, claw vacuum
pumps, dry claw vacuum pumps, roots vacuum pumps, dry roots
vacuum pumps, dry roots/claw vacuum pumps, scroll vacuum
pumps, dry scroll vacuum pumps, piston vacuum pumps, oil
sealed vacuum pumps, oil flooded vacuum pumps, diffusion
vacuum pumps, turbomolecular vacuum pumps, dry
turbomolecular vacuum pumps, and controllers therefor;
computer software for updating firmware for monitoring
status, operation, function, environment, failures and
errors of pumps, vacuum pumps, dry vacuum pumps, screw
vacuum pumps, dry screw vacuum pumps, claw vacuum pumps, dry
claw vacuum pumps, roots vacuum pumps, dry roots vacuum
pumps, dry roots/claw vacuum pumps, scroll vacuum pumps, dry
scroll vacuum pumps, piston vacuum pumps, oil sealed vacuum
pumps, oil flooded vacuum pumps, diffusion vacuum pumps,
turbomolecular vacuum pumps, dry turbomolecular vacuum
pumps; computer software for designing and configuring gas,
chemical, vacuum and exhaust management systems; computer
software for use in controlling vacuum pump systems and
keypad/displays for vacuum pump systems; computer interface
software; computer software for data integration;
intelligent gateways for data processing; user interface
software, user interface display; configurable interface,
configurable user interface; programmable controls;
programmable controllers; programmable control apparatus;
programmable displays; data processing equipment and
computers; data transmitters; data collection apparatus;
real-time data processing apparatus; monitoring,
communication and analysis equipment; hardware and software
for use in diagnostic and support services for manufacturing
processes; electrical controls, electric control devices for
pumps, vacuum pumps, dry vacuum pumps, screw vacuum pumps,
dry screw vacuum pumps, claw vacuum pumps, dry claw vacuum
pumps, roots vacuum pumps, dry roots vacuum pumps, dry
roots/claw vacuum pumps, scroll vacuum pumps, dry scroll
vacuum pumps, piston vacuum pumps, oil sealed vacuum pumps,
oil flooded vacuum pumps, diffusion vacuum pumps,
turbomolecular vacuum pumps, dry turbomolecular vacuum
pumps; electric and electronic controllers for pumps, vacuum
pumps, dry vacuum pumps, screw vacuum pumps, dry screw
vacuum pumps, claw vacuum pumps, dry claw vacuum pumps,
roots vacuum pumps, dry roots vacuum pumps, dry roots/claw
vacuum pumps, scroll vacuum pumps, dry scroll vacuum pumps,
piston vacuum pumps, oil sealed vacuum pumps, oil flooded
vacuum pumps, diffusion vacuum pumps, turbomolecular vacuum
pumps, dry turbomolecular vacuum pumps; electrical
controlling devices for pumps and vacuum pumps; electrical
controlling devices for dry vacuum pumps, screw vacuum
pumps, dry screw vacuum pumps, claw vacuum pumps, dry claw
vacuum pumps, roots vacuum pumps, dry roots vacuum pumps,
dry roots/claw vacuum pumps, scroll vacuum pumps, dry scroll
vacuum pumps, piston vacuum pumps, oil sealed vacuum pumps,
oil flooded vacuum pumps, diffusion vacuum pumps,
turbomolecular vacuum pumps, dry turbomolecular vacuum
pumps; wireless controllers to remotely monitor and control
the function and status of other electrical, electronic, and
mechanical devices or systems; electronic display monitors,
display monitors; information display terminals; displays
for control devices and controllers for pumps, vacuum pumps,
dry vacuum pumps, screw vacuum pumps, dry screw vacuum
pumps, claw vacuum pumps, dry claw vacuum pumps, roots
vacuum pumps, dry roots vacuum pumps, dry roots/claw vacuum
pumps, scroll vacuum pumps, dry scroll vacuum pumps, piston
vacuum pumps, oil sealed vacuum pumps, oil flooded vacuum
pumps, diffusion vacuum pumps, turbomolecular vacuum pumps,
dry turbomolecular vacuum pumps; remote controls, remote
control apparatus, remote control receivers, remote control
transmitters; industrial controllers, industrial controllers
for pumps and vacuum pumps; power controllers, electronic
power controllers, power controllers for pumps, vacuum
pumps, dry vacuum pumps, screw vacuum pumps, dry screw
vacuum pumps, claw vacuum pumps, dry claw vacuum pumps,
roots vacuum pumps, dry roots vacuum pumps, dry roots/claw
vacuum pumps, scroll vacuum pumps, dry scroll vacuum pumps,
piston vacuum pumps, oil sealed vacuum pumps, oil flooded
vacuum pumps, diffusion vacuum pumps, turbomolecular vacuum
pumps, dry turbomolecular vacuum pumps; pump controllers,
vacuum pump controllers, dry vacuum pump controllers, screw
vacuum pump controllers, dry screw vacuum pump controllers,
claw vacuum pump controllers, dry claw vacuum pump
controllers, roots vacuum pump controllers, dry roots vacuum
pump controllers, dry roots/claw vacuum pump controllers,
scroll vacuum pump controllers, dry scroll vacuum pump
controllers, piston vacuum pump controllers, oil sealed
vacuum pump controllers, oil flooded vacuum pump
controllers, diffusion vacuum pump controllers,
turbomolecular vacuum pump controllers, dry turbomolecular
vacuum pump controllers
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