07
Machines for processing semiconductors, solar cells, fibers
and other substrates; machines for etching semiconductor
surfaces; machines for vapor deposition or coating of
semiconductor surfaces, under vacuum [so-called CVD process]
or atmospheric or under plasma influence; machines for
conveyance [atmospheric or sub-atmospheric or under
predefined gas atmosphere]; machines for atomic layer
deposition [=ALD]; equipment and devices for thermal
processing or manufacturing processes, namely coating
equipment, annealing equipment, vacuum soldering, chemical
vapor deposition equipment [CVD equipment]
09
Hardware and software for the operation of semiconductor
manufacturing machines and heating installations
11
Firing furnaces; vacuum furnaces; laminating furnaces;
apparatus for thermal, dry and wet-chemical waste gas or gas
cleaning; industrial furnaces for thermal processing of
semiconductors, solar cells, fibers and other substrates as
well as their thermal processing under vacuum; industrial
furnaces for thermal processing of surfaces and objects,
namely diffusion furnaces, conveyor belt furnaces, coating
furnaces; equipment for the treatment and purification of
gases and waste gases, namely waste gas treatment equipment;
equipment and devices for thermal processing or
manufacturing processes, namely diffusion furnaces, conveyor
belt furnaces, firing furnaces; radiation-based rapid
heating installations consisting of heating apparatus and
heating plasma-based apparatus and their combination;
industrial furnaces for thermal layer growth and thermal
layer transformations
37
Construction, repair, installation and maintenance work
relating to machinery and machine tools as well as their
individual parts, as a whole, respectively for the
manufacturing and processing of solar cells [turnkey
solutions], semiconductors, fibers and raw materials
therefor; services for the assembly of semiconductor
devices, both atmospheric as well as sub-atmospheric
Die Bezeichnungen wurden automatisch übersetzt. Übersetzung anzeigen