07
Coating machines, vacuum coating machines, sputtering
machines, endblocks for coating machines and for sputtering
machines, parts and fittings for all the aforesaid goods;
machine parts and vacuum components used in coating machines
used in the thin-film industry, namely, inserts, shunts,
pallet wafers, anode magnet covers, carriers, clamps,
flanges, nozzles, screws, shut off pins, stamper cleaners,
turbo screens, turntables, vacuum chambers and weldments;
machine parts and vacuum components used in coating machines
used in the thin-film industry, namely, backing plates,
targets, cathodes, deposition shields, coils, cooling
plates, cooling posts, cooling rings, crucibles,
feedthroughs, foils, masks, housings, dark space shields,
pole pieces, susceptors, thermal plates, thermocouplers,
upper electrodes and sputtering magnetrons; machines for
substrate processing, in particular machines for glass and
polymer processing and machines for rigid, flexible, 2D and
3D-shaped substrate processing; machines for cleaning thin
film industrial components; machines for the production of
sputtering targets; machines for spraying, casting,
extruding, sintering, pressing, forming and treating
materials; bonding machines for sputtering targets
09
Measuring and detecting instruments, indicators and
controllers; testing and quality control devices, in
particular instruments for measuring coatings on substrates
such as glass or polymer-based rigid or flexible substrates;
magnetrons and cathodes; planar and rotary magnetrons and
cathodes; cathodes for use in the thin-film industry, in
particular for use in coating machines; user and instruction
manuals in electronic format
42
Research, design, technical consultancy related to design
and research and technical surveying in connection with
coating machines, sputtering equipment, deposition
processes, thin film coating processes, target material
formulation, target production, glass processing equipment,
polymer processing equipment, rigid, flexible, 2D and
3D-shaped substrate processing equipment; technical
measuring and testing; product development, testing and
research; design and inspection services; computer
programming; building and construction drafting; all
aforementioned services relating to weighing, measuring and
checking (supervision) apparatus and instruments, and
relating to apparatus, instruments and equipment for
testing, measuring and checking of target materials and
coatings, coating machines, sputtering machines, and
relating to parts and fittings for all the foregoing;
quality testing and control services and development
services of machines and equipment used in thin-film
industry, coating, sputtering, rigid, flexible, 2D and
3D-shaped substrate processing, deposition processes, target
composition and morphology, target production and target
bonding, and consultancy relating thereto; custom design of
materials related to layer properties, sputter behavior,
shape, geometry, morphology such as crystallinity,
orientation, crystal size
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