07
Vacuum pumps and vacuum pump stations consisting of vacuum
pumps; vacuum pumps [machines] and vacuum pump stations
composed thereof; drives and shaft bearings for vacuum
pumps; parts of vacuum pumps and vacuum pump installations,
specifically oil separators, condensate separators, dust
separators, filters, vapour condensers, flanges with
incorporated coolers and control apparatus that are
specially adapted and cannot be used independently; valves
[parts of machines]; vacuum installations substantially
consisting of vacuum pumps and adapted accessories for
vacuum pumps that cannot be used independently, specifically
oil separators, condensate separators, dust separators,
filters, vapour condensers, flanges, valves, vacuum chambers
and process-related fixtures [as parts of these
installations] with incorporated coolers, control apparatus,
measuring apparatus and connecting cables; parts of vacuum
installations [machines], in particular current
feedthroughs, thermocouple feedthroughs, fluid feedthroughs,
pipe feedthroughs, rotary feedthroughs, rotary/linear motion
feedthroughs, linear motion feedthroughs being specially
adapted and cannot be used independently for vacuum pump
installations (machines); parts of vacuum pumps and vacuum
pump stations, specially adapted and cannot be used
independently, included in this class; automatic valves for
gas intake as parts of machines
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