09
Computer software and hardware for use in sensing,
monitoring, and analyzing various solid, liquid and gaseous
contaminants; software and hardware for counting contaminant
particles; software and hardware for monitoring polishing
and planarization slurries; software and hardware for
continuous monitoring of hydrogen peroxide concentrations;
cleanliness testing stations comprised in part of computer
hardware, computer software, or computer peripherals
37
Installation, maintenance and repair services, namely,
installation, maintenance and repair of computer hardware
for: sensing, monitoring, and analyzing various solid,
liquid and gaseous contaminants, sensing, monitoring, and
analyzing hydrogen peroxide concentrations, counting
contaminant particles, monitoring polishing and
planarization slurries and cleanliness testing
41
Education and training services, namely, offering training
programs and seminars tailored to the operation,
maintenance, repair and calibration of systems for: sensing,
monitoring, and analyzing various solid, liquid and gaseous
contaminants, sensing, monitoring, and analyzing hydrogen
peroxide concentrations, counting contaminant particles,
monitoring polishing and planarization slurries and
cleanliness testing
42
Installation, maintenance and repair services, namely,
installation, maintenance and repair of computer software
for: sensing, monitoring, and analyzing various solid,
liquid and gaseous contaminants, sensing, monitoring, and
analyzing hydrogen peroxide concentrations, counting
contaminant particles, monitoring polishing and
planarization slurries and cleanliness testing; development
of computer programs for manufacturing process
characterization and design relating to contaminants,
cleanliness, and hydrogen peroxide concentrations;
development of computer programs for trouble shooting of
manufacturing processes relating to contaminants,
cleanliness, and hydrogen peroxide concentrations;
development of computer programs for design of product
validity procedures, testing methods and techniques related
to contaminants, cleanliness, and hydrogen peroxide
concentrations; development of computer programs for
manufacturing site surveys related to contaminants,
cleanliness, and hydrogen peroxide concentrations;
development of computer programs for on-site testing for
contaminants, cleanliness, and hydrogen peroxide
concentrations; development of computer programs for
microcontamination testing services; development of computer
programs for laboratory testing for contaminants,
cleanliness and hydrogen peroxide concentrations
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