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Mechanical devices, namely accelerometers, inertial measurement units, namely, accelerometers and gyroscopes, and electric relays; spring contactors and probes for testing integrated circuits and memory units; electromechanical arming devices for use in munitions and armaments; micro electromechanical devices that provide power to electronics or electrical systems; micro electromechanical devices, namely, actuators and sensors for sensing electromagnetic effects, pressure, temperature, humidity, radiation, motion and sound in the environment for use by the aerospace, military, automotive, communications, electronics, information technology and biotechnology industries, and in the manufacture of industrial and consumer products; electromechanical devices, namely active cooling systems for electronics; microchannels used for cooling or delivery of gas or liquid in a chip-based system
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