7
heat treating, cleaning, etching, implanting and leveling machines, and parts thereof, for use in the production of semiconductor; tooling for heat treating, cleaning, etching, implanting and leveling machines; and operating manuals and computer software sold as a unit with implanting, heat treating, cleaning, etching, implanting and leveling machines
9
lithographic and implanting machines, and parts thereof, for use in producing images and in printing or implanting images on wafers and other substrates; electron-beam columns and electron-beam systems, and parts thereof, for use in the production of semiconductors; reticles and masks for use with lithographic and implanting machines, and electron-beam columns and systems; computer software for use in the operation of lithography, implanting, heat treating, cleaning, etching, implanting and leveling machines, and electron-beam columns and systems; tooling for lithography machines and electron-beam columns and systems; and operating manuals and computer software sold as a unit with lithographic machines and electron-beam columns and systems
16
printed operations manuals for lithographic, implanting, heat treating, cleaning, etching, implanting and leveling machines, and electron-beam columns and systems
37
service and repair of lithographic, implanting, heat treating, cleaning, etching, implanting and leveling machines, and electron-beam columns and systems; and
41
conducting courses of instruction and training programs in the use and operation of lithographic, implanting, heat treating, cleaning, etching, implanting and leveling machines, and electron-beam columns and systems, and distribution of instructional course materials in connection therewith
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