7
					heat treating, cleaning, etching, implanting and leveling machines, and parts thereof, for use in the production of semiconductor; tooling for heat treating, cleaning, etching, implanting and leveling machines; and operating manuals and computer software sold as a unit with implanting, heat treating, cleaning, etching, implanting and leveling machines
				
				
			
							
				
					9
					lithographic and implanting machines, and parts thereof, for use in producing images and in printing or implanting images on wafers and other substrates; electron-beam columns and electron-beam systems, and parts thereof, for use in the production of semiconductors; reticles and masks for use with lithographic and implanting machines, and electron-beam columns and systems; computer software for use in the operation of lithography, implanting, heat treating, cleaning, etching, implanting and leveling machines, and electron-beam columns and systems; tooling for lithography machines and electron-beam columns and systems; and operating manuals and computer software sold as a unit with lithographic machines and electron-beam columns and systems
				
				
			
							
				
					16
					printed operations manuals for lithographic, implanting, heat treating, cleaning, etching, implanting and leveling machines, and electron-beam columns and systems
				
				
			
							
				
					37
					service and repair of lithographic, implanting, heat treating, cleaning, etching, implanting and leveling machines, and electron-beam columns and systems; and
				
				
			
							
				
					41
					conducting courses of instruction and training programs in the use and operation of lithographic, implanting, heat treating, cleaning, etching, implanting and leveling machines, and electron-beam columns and systems, and distribution of instructional course materials in connection therewith