04
Oils, namely mineral oils, silicone oils, synthetic oils and
perfluoropolyether oils; lubricants; silicon sealants and
greases used for sealing vacuum parts; greases
06
Flanges; flange fittings; clamps; commercial containers of
metal for transporting semiconductor processing equipment
07
Vacuum apparatus and vacuum machines all included in this
class; vacuum pumps; oil sealed pumps; rotary vane pumps;
oil sealed rotary pumps; oil sealed piston pumps; booster
pumps; scroll pumps; dry pumps; dry vacuum pumps; liquid
ring vacuum pumps; industrial dry pumps; diaphragm pumps;
jet pumps; turbomolecular pumps; compound molecular pumps;
regenerative pumps; vapour pumps; diffusion pumps; chemical
pumps; chemical dry pumps; chemical dry vacuum pumps;
chemical pumping systems; vacuum shelf dryers; steam ejector
vacuum machines and equipment; exhaust gas management
apparatus and equipment; apparatus for controlling the
temperature of exhaust gas pipes; pump controllers; valves;
valve controllers; chemical blending apparatus and delivery
system and point of use chemical blending apparatus and
delivery system; apparatus and system for blending and
distribution of chemical mechanical polishing slurries;
parts and fittings for all the aforesaid goods
09
Scientific apparatus, spectrograph apparatus, mass
spectrometers, instruments and apparatus for use in testing,
control, detection, monitoring and the analysis of materials
in scientific and industrial operations, pressure gauges;
pressure regulators; apparatus and instruments all for
detecting fluid leaks; ionisation gauges, vacuum gauges,
convection gauges; pirani gauges; penning gauges; ion
gauges; magnetron gauges; inverted magnetron gauges; wide
range gauges; thermocouple gauges; strain gauges;
transducers; controllers for gauges; capsule dial gauges;
gas sensors; moisture sensors; calibration apparatus,
instruments and equipment; de-aerating apparatus;
accelerated ion devices including devices for coating
substrates; apparatus for thin-film deposition; vacuum
deposition technology apparatus, instruments and equipment;
vapour deposition apparatus, instruments and equipment;
electron beam deposition apparatus, instruments and
equipment; electron beam furnace equipment, electron beam
evaporation equipment, electron beam annealing equipment,
electron beam surface conditioning equipment sputtering
apparatus, instruments and equipment; electric valves;
electronic valves; electrical power supplies; parts and
fittings for all the aforesaid goods; computer software for
monitoring system status and providing data relating to
vacuum, exhaust abatement, chemical use and gas use,
relating to the manufacture of semiconductors and integrated
circuits; computer software for designing and configuring
gas, chemical, vacuum and exhaust management systems; on
line particle size analytical device for use in chemical
mechanical polishing system
11
Installations and apparatus for refrigerating, cooling and
chilling; installations and apparatus for the treatment,
purification and disposal of solid, liquid, and gaseous
matter; water purification units; water treatment units;
installations and apparatus for igniting, heating, burning
and scrubbing gas; installations and apparatus for cleaning
exhaust gases from the semiconductor industry; gas abatement
apparatus; integrated gas pumping and abatement apparatus;
gas scrubbing apparatus; wet scrubbers; water cooled traps;
traps for collection or removal of semiconductor process
exhaust products; filter traps, gas reactors; gas recovery
apparatus; gas separating apparatus; and parts and fittings
for all the aforesaid goods
37
Repair and maintenance of semiconductor processing
equipment, exhaust gas management systems, chemical
distribution systems, water treatment systems, heat
exchangers, chillers, vacuum apparatus and vacuum pumps and
parts and fittings therefor; refurbishment of semiconductor
processing equipment; consultancy and advisory services for
the installation and maintenance of apparatus for the
provision of gases and gas mixtures, chemicals, vacuum
and/or exhaust management in the manufacture of
semiconductors and similar devices
40
Consultancy and advisory services for the modification of
apparatus for the provision of gases and gas mixtures,
chemicals, vacuum and/or exhaust management in the
manufacture of semiconductors and similar devices
41
Consultancy and arranging of seminars in the field of vacuum
and exhaust management engineering; training services for
the design, installation, modification, calibration,
operation, application and maintenance of apparatus for the
provision of gases and gas mixtures, chemicals, vacuum
and/or exhaust management in the manufacture of
semiconductors and similar devices
42
Consultancy, design, advisory services for the design and
calibration of apparatus for the provision of gases and gas
mixtures, chemicals, vacuum and/or exhaust management in the
manufacture of semiconductors and similar devices