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The Union trademark MKS was filed as Word mark on 09/06/2005 at the European Union Intellectual Property Office.
It was registered as a trademark on 02/09/2007.
The current status of the mark is "Trademark registered".
| Trademark form | Word mark |
| File reference | 004621215 |
| Application date | September 6, 2005 |
| Publication date | July 31, 2006 |
| Entry date | February 9, 2007 |
| Expiration date | September 6, 2025 |
Trademark owner
2 Tech Drive, Suite 201
01810 Andover
US
01810 Andover
US
Trademark representatives
Portershed a Dó, 15 Market Street
H91 TCX3 Galway
IE
goods and services
7
Pressure valves; liquid feed systems, consisting mainly of a pump, a vaporiser and a power control mechanism, for vaporising a liquid into a gas, and for delivering the gas to a process chamber; microwave generators
9
Sensors and electric instruments and apparatus, power supplies, signal processing apparatus, analog and digital measuring apparatus for measuring and controlling medium flow pressure, vacuum and flow; residual gas analysers; process monitoring apparatus and optical monitoring apparatus for determining gas compositions within a process chamber, quadrupole mass spectrometers; electric analog/digital interface adapters, bridging devices and card modules; radio frequency, direct current and microwave power supplies; thermal electric and pressure-based mass flow control apparatus; gas sticks, consisting of mass flow controls, pressure transducers, control valves, block valves and volumes; helium leak detectors; gas detectors and analysers for monitoring gas emissions for safety purposes and for compliance with regulations; calibration equipment for pressure transducers and flow converters and for flow meters; vacuum measuring systems, vacuum measuring apparatus, transducers; testing apparatus for process gases or circulation gases; vacuum sensing and switching equipment, namely, vacuum sensor switches; hardware and software for measuring the transparency, reflectivity, optical density and thickness of thin metal films, and for providing topographical images thereof; software for operating optical spectrometers; software for operating quadrupole mass spectrometers; software for determining the presence of, and measuring, the residual contaminants in a semiconductor process; electronic control apparatus, namely microprocessor-based data communications devices for communication of data between quadrupole mass analysers and a computer
11
Electric and electronic power generators for converting energy from chemical gas reactions into power for conducting processes in a process chamber; gas pressure valves for controlling and shutting off gas flows; heating devices for vacuum and gas components; gas filtering and cleaning apparatus; heating devices, electric heating jackets and electrically heatable collecting basins for collecting waste materials from a process chamber
Trademark history
| Date | Document number | Area | Entry |
|---|---|---|---|
| February 8, 2025 | Extension, Notification of expiry of trade mark | ||
| March 21, 2024 | Change Representative, Published | ||
| February 19, 2020 | Change Representative, Published | ||
| October 30, 2019 | Change Representative, Published | ||
| May 17, 2019 | Change Representative, Published | ||
| October 2, 2018 | Change Representative, Published | ||
| October 8, 2015 | Extension, Trade mark renewed | ||
| August 13, 2015 | Transfer / Change of address, Published | ||
| April 24, 2015 | Change Representative, Published |
ID: 11004621215