07
Machines for the manufacture of products for information
technology, in particular in the fields of semiconductors,
data stores, flat panel displays and optical components;
vacuum pumps (machines), namely for the semiconductor
industry; machines for semiconductor production, machines
for chip production and chip assembly; thin film production
machines; machines for carrying out coating and etching
processes, namely in semiconductor production; machines for
the assembly of semiconductor devices; machines for the
manufacture of electrical connections in semiconductor
devices, apparatus for coating, in particular for optical
and magnetic data carriers; machines for the manufacture of
electrical connections between chips and carrier substrate,
as well as for flip-chip assembly; all the aforesaid goods,
included in this class
09
Apparatus for the automatic control and monitoring of
production lines, measuring and analysis apparatus for the
semiconductor industry; electrical and/or electronic and/or
computer-assisted controllers for the semiconductor
industry, computer software; hybrid circuits, circuit boards
with or without mounting; semiconductor components,
including transistors, rectifiers, integrated circuits and
other electronic components, in particular those
manufactured from polycrystalline silicon and silicon
starting materials; electronic components; wafers (silicon
slices for integrated circuits); glass wafers (glass slices
for integrated circuits); ingots (block of semiconductor
material); semiconductors; integrated circuits
42
Scientific and industrial research; providing of expert
opinions, technical consultancy and providing of chemistry,
engineering, and/or physics services; design and development
of computer hardware and software
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