07
Machines for processing of solar cells or semiconductors;
surface treatment machines for semiconductor surfaces, in
particular wafers by means of vapor deposition, atmospheric
and sub-atmospheric; equipment and devices for thermal
processing or manufacturing processes for semiconductor
surface treatment by means of vapor deposition, namely
coating equipment, vacuum soldering machines, chemical vapor
deposition equipment (CVD equipment) as well as thermal
treatment equipment (diffusion equipment); oxidation
equipment, namely surface treatment machines for forming an
oxide layer on a surface
09
Hardware and software for the operation of aforementioned
products [as far as included in class 9]
11
Machines for the thermal processing of solar cells or
semiconductors; machines for the thermal processing of
surfaces and objects, namely diffusion furnaces, oxidation
or annealing equipment; equipment and devices for thermal
processing or manufacturing processes, namely diffusion
furnaces, oxidation or annealing equipment
37
Construction, repair, installation and maintenance work
relating to machinery and machine tools as well as their
individual parts, as a whole, respectively for the
manufacturing and processing of solar cells [turnkey
solutions]; services for the assembly of devices for
equipment or for process optimization, both atmospheric as
well as sub-atmospheric