09
Downloadable computer software; computer software for
semiconductor lithography equipment; computer software for
fault diagnosis and anomaly detection of semiconductor
lithography equipment; computer software for automatic
restoration of semiconductor lithography equipment; computer
software for technical advice relating to performance and
operation of semiconductor lithography equipment by remote
control; computer software for providing of information
relating to the operating status of semiconductor
lithography equipment; computer software for providing
optimum setting information of semiconductor lithography
equipment, namely, for providing information in the field of
improving productivity thereof; computer software for
providing support and maintenance service of semiconductor
lithography equipment; computer software for providing
proposal for replacement of parts of semiconductor
lithography equipment
37
Repair or maintenance of semiconductor lithography equipment
and providing information relating thereto
42
Providing temporary use of on-line non-downloadable computer
software; providing temporary use of on-line
non-downloadable computer software for semiconductor
lithography equipment; providing temporary use of on-line
non-downloadable computer software for fault diagnosis and
anomaly detection of semiconductor lithography equipment;
providing temporary use of on-line non-downloadable computer
software for automatic restoration of semiconductor
lithography equipment; providing temporary use of on-line
non-downloadable computer software for technical advice
relating to performance and operation of semiconductor
lithography equipment by remote control; providing temporary
use of on-line non-downloadable computer software for
providing of information relating to the operating status of
semiconductor lithography equipment; providing temporary use
of on-line non-downloadable computer software for providing
optimum setting information of semiconductor lithography
equipment, namely, for providing information in the field of
improving productivity thereof; providing temporary use of
on-line non-downloadable computer software for providing
support and maintenance service of semiconductor lithography
equipment; providing temporary use of on-line
non-downloadable computer software for providing proposal
for replacement of parts of semiconductor lithography
equipment; design, creation, repair or maintenance of
computer software for semiconductor lithography equipment;
remote monitoring service of semiconductor lithography
equipment [industrial analysis and quality control];
technological consultancy relating to performance and
operation of semiconductor lithography equipment; providing
information relating to industrial analysis and quality
control of production processes using semiconductor
lithography equipment; providing information of industrial
analysis and quality control services relating to
semiconductor lithography equipment; analysis of technical
data of semiconductor lithography equipment and providing
information relating thereto