7
High-precision components made of glass ceramics with low expansion for the exact dimensioning of machine constructions for use in mechanical engineering, namely, components used in the engineering and machining of orbital telescopes used in astronomy, silicon wafers, steppers, scanners, measuring instruments used in laboratories and optical instruments
9
Mirror holders made of glass ceramics for concave, convex, and plane optical mirrors; translucent optical components made of glass ceramics for the testing of astronomical mirror holders, namely, mandrel material for the shaping of mirror shells in x-ray telescopes and mirror substrates of earthbound and orbital telescopes; high-precision mechanical components made of glass ceramics with low expansion for laboratory apparatus for the exact dimensioning of laboratory constructions, namely, for use in laboratory measuring instruments; high-precision mechanical components made of glass ceramics with low expansion for the exact dimensioning of lithographical apparatus for use in lithography and micro-lithography, namely, movable mechanical parts in silicon wafer stepper and scanner machines for wafer positioning, and substrate material for reflective optics in EUV lithography; high-precision mechanical components made of glass ceramics with low expansion for the exact dimensioning of laser apparatus for use in laser technology, high-precision opto-mechanical components made of glass ceramics with low expansion used in opto-mechanical technology in the field of space exploration, high-precision components made of glass ceramics with low expansion for measurement technology, namely, gyroscopes and carriers for length scales