7
Getter pumps and parts thereof; pumps; capture pump; vacuum pumps; capture vacuum pumps; gas capture pump; gas entrapment pumps; non-evaporable getter (NEG) pumps; vacuum pumps [machines]; metal discs and stacks thereof for pumps; solid or coated metal discs and stacks thereof for pumps; discs of zirconium, iron and vanadium and stacks thereof for pumps; discs coated with zirconium, iron and vanadium and stacks thereof for pumps; pump controllers; vacuum pump controllers; getter pump controllers; NEG pump controllers; parts and fittings for all the aforesaid goods
9
Getter pumps and parts thereof; Getter devices and getter units being part of scientific and research apparatus and instruments, in particular laboratory apparatus with vacuum chambers for experimenting, etching, coating under vacuum, apparatus for scanned electronic microscopy (SEM) and transmission electron microscopy, Mass Spectrometry and parts therefore; components for optoelectronics; software for operating vacuum pumps; gas sorptive devices, in particular getter components or getter cartridges for laboratory purposes employing a non-evaporating getter metal, namely, zirconium, titanium, tantalum, or niobium, alloys of two or more of these metals with each other or with other metals; electronic control apparatus and instruments for use with vacuum pumps for perfecting and maintaining vacuum and parts thereof; apparatus and instruments for scientific research in laboratories for selective absorption of gases; vacuum-improving apparatus and instruments and parts thereof being part of scientific and research apparatus and instruments, in particular pumping stations, vacuum chambers, analysis equipment, measurement equipment; measuring apparatus and instruments, including the ones used for measuring vacuum and humidity; getter devices for scientific use incorporating metal alloys powders for sorbing gasses or for perfecting and maintaining vacuum; apparatus and instruments for perfecting and maintaining vacuum in scientific or electronic devices, lamps, monitors, flat panels and displays, kinescopes, television screens; parts and fittings for all the aforesaid goods; electric control devices for pumps, vacuum pumps, getter pumps, ion getter pumps, non-evaporable getter pumps; power controllers for pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps; electric and electronic controllers for pumps, vacuum pumps, getter pumps, ion getter pumps, non-evaporable getter pumps; instruments and apparatus for use in testing, control, detection, monitoring and the analysis of materials during operation of pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps; displays for control devices and controllers for pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps