9
Measuring devices for measuring contents of gases, in particular mass spectrometers, process gas analyzers, laboratory gas analyzers, molecular beam and plasma analyzers, and parts therefor; measuring apparatus for process monitoring and process control for processing gases, and parts therefor
42
Engineering, in particular development and operation of measuring devices for measuring contents of gases, in particular mass spectrometers, process gas analyzers, laboratory gas analyzers, molecular beam and plasma analyzers, and parts therefor, and for measuring apparatus for process monitoring and process control, in particular for processing gases, and parts therefor; development of software applications for the afore-said devices and apparatus; development of computer operating programs for measuring devices for measuring contents of gases, in particular mass spectrometers, process gas analyzers, laboratory gas analyzers, molecular beam and plasma analyzers, and parts therefor, and for measuring apparatus for process monitoring and process control for processing gases, and parts therefor; service and software application support for measuring devices for measuring contents of gases, in particular mass spectrometers, process gas analyzers, laboratory gas analyzers, molecular beam and plasma analyzers, and parts therefor, and for measuring apparatus for process monitoring and process control, in particular for processing gases, and parts therefor