1
Coating compositions [chemicals for vacuum coating], other than paint; chemical coatings for manufacturing surface compositions using physical vapour deposition; ceramic sputtering targets
6
Metal sputtering targets
7
Machines for vacuum coating of disc-shaped plastic substrates by sputtering or vacuum deposition of metal, metal alloys, metal oxides or metal nitrides for the production of optical storage media; machines for vacuum coating, in particular physical or chemical vapour deposition, on planar and three-dimensional substrates, in particular plastic, glass, ceramic or metal substrates, in particular in the fields of food, beverages, cosmetics, jewelry, automotive, optics, sanitary engineering, lighting, medical engineering, consumer and household electronics and other industrial applications; machines for multi-layer vacuum deposition of metals or ceramics for the production of storage media, in particular disc-shaped storage media; machines for vacuum deposition of layers, in particular transparent, conductive, metallic, semi-conductive, non-conductive, dielectric or transparent/electrically conductive, or passivating layers, in particular using physical or chemical vapour deposition on substrates, in particular on glass and silicon; machines for large area coating using physical vapour deposition, in particular for the layer deposition of copper, indium, gallium, selenium, sulfur, indium sulfide, sodium fluoride, potassium fluoride, aluminium or combinations of these materials on glass or flexible substrates for the production of thin film solar cells; machines for large area coating using physical vapour deposition, in particular for the layer deposition of cadmium, tellurium, cadmium sulfide, cadmium chloride or combinations of these materials on glass substrates for the production of thin film solar cells; machines for metal organic chemical vapour deposition (MO-CVD) and metal organic vapour phase epitaxy (MOVPE); machines for large area coating using vacuum deposition, in particular horizontal or vertical sputtering deposition, on glass, metal or plastic substrates, in particular for the production of solar cells; machines for injection molding, vacuum deposition, lacquering (spin-coating), bonding, UV-curing and quality inspection for the production of optical storage media, in particular CD, DVD5/10, DVD9; machines for injection molding, vacuum deposition, lacquering (spin-coating), (wet) embossing, UV-curing and quality inspection for the production of optical storage media, in particular Optical storage disc, in particular BD25/33/50/66/100, BD-UHD; machines for injection molding, in particular of thin-wall optical parts and micro-structured parts; machines for nano imprint lithography by (wet) embossing, in particular for the production of diffractive optical components, microfluidic devices and micro electro mechanical structures (MEMS); machines for cleaning, vacuum deposition, spin-coating for photoresist, laser exposure, photoresist developing, laser beam recording and quality inspection, in particular for the production of disc masters for CD, DVD5/10, DVD 9, Optical storage disc and other recording formats; machines for multi-layer deposition of magnetic and non-magnetic materials by physical vapour deposition, in particular rotating substrate deposition, for research, development and production; machines for multi-layer deposition of magnetic and non-magnetic materials by physical vapour deposition, in particular linear-dynamic-deposition, for research, development and production of MRAM memory cells and magnetic sensors, in particular for anisotropic magnetoresistance (AMR), giant magnetoresistance (GMR) and tunnel magnetoresistance (TMR) structures; machines for thermal treatment (heating and cooling) of pre-coated large area substrates in a controlled gas atmosphere for the production of solar cells, in particular thin film solar cells; in-line machines for wet chemical treatment, in particular etching, cleaning, coating and drying, in particular for thin-film solar cells; machines for wet chemical treatment of batches of substrates, in particular etching, cleaning, coating and drying of substrates, in particular of semiconductor or glass wafers for production of crystalline solar cells, semiconductor devices and optical components; machines for wet chemical bath deposition of layers, in particular cadmium sulfide, zinc oxide-sulfide and zinc sulfide for thin film solar cells; in-line machines for wet chemical treatment, in particular cleaning, acidic etching, alkaline etching and drying, for single side and double side processing of glass and silicon substrates; machines for wet chemical treatment of batches of material, in particular chemical etching, cleaning and drying of mono and multi crystalline silicon, in particular chunks and ingot off cuts; combinations of machines for automation, vacuum deposition, surface treatment, lacquering (spray-coating), UV-curing or drying, for the refinement of planar and three-dimensional substrates, in particular of plastic, glass, ceramic or metal, in particular for the fields of food, beverages, cosmetics, jewelry, automotives, optics, sanitary engineering, lighting, medical engineering, consumer and household electronics or other industrial applications; combinations of machines for automation, vacuum deposition, wet chemical treatment, laser ablation, screen print or thermal treatment for the manufacturing of solar cells, in particular silicon solar cells; combinations of machines for automation, vacuum deposition, wet chemical treatment, laser ablation, thermal treatment, lamination or contacting for the manufacturing of solar cells, in particular thin film solar cells
9
Measuring apparatus and instruments being parts of machines and/or machine combinations
20
Receptacles of plastic for storing, transporting and processing substrates, in particular silicon wafers
37
Installation, repair and maintenance services in relation to machines, machine components and machine combinations; installation, repair and maintenance services in relation to measuring apparatus and instruments being parts of machines and/or machine combinations
41
Education; providing of training and training courses for installation, maintenance and repair of machines and machine combinations
42
Scientific and technological services and research and design relating thereto; industrial analysis and research services; design and development of industrial production facilities; engineering, technical consultation, planning, technical design and realization of industrial production facilities; analysis, development, research and optimization related to function, productivity and cost of industrial production processes; analysis, development, research and optimization of industrial products and devices