7
Semiconductor wafer processing equipment such as epitaxial reactors, rapid thermal processing systems, atomic layer deposition reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, chemical mechanical polishers; equipment and systems comprised of machinery for making flat panel displays; equipment and systems comprised of machinery for making photovoltaic solar cells, for making inverters, and for making solar radiation-related monitoring and tracking systems, all for the construction and manufacturing of machines and instruments for the generation and transformation of electricity from solar energy
9
Integrated circuits; flat panel displays; semiconductor wafer processing components, namely, epitaxial reactors, rapid thermal processing systems, atomic layer deposition reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, chemical mechanical polishers; and operational software sold as a component of the foregoing; all for the processing and production of integrated circuits, semiconductor substrates, thin films, silicon discs and wafers; electron microscopes; computer software for use in diagnostic and fault detection of semiconductor wafers and photovoltaic cells; electronic imaging platforms in the field of inspection of semiconductor materials, namely semiconductor wafers and photovoltaic cells; electronic apparatus for measuring and testing semiconductor wafers and photovoltaic cells; solar cells; electronic sensors for measuring solar radiation; photovoltaic cells and modules
37
Maintenance and repair of semiconductor processing and production equipment; maintenance and repair of solar production equipment; maintenance and repair of flat panel display processing and production equipment