7
Machines, installations and machine tools, in particular automated machines, installations and production lines; Machine parts, spare parts and accessories for machines, installations and machine tools; Transport installations; Handling machines and handling apparatus, in particular robots, manipulators and grabs; Transporters; Machines and installations for the production, coating and/or processing of materials, in particular for the manufacture and/or processing of flat substrates for the circuit board industry and the photovoltaic industry; Presses, in particular laminating presses for the manufacture of solar modules, circuit boards and smart cards; Machines and installations for the manufacture of chemical products, in particular for the manufacture of silicon and silanes; Machines and installations for coating and/or surface treatment of materials, in particular semiconductor materials, glass, plastics or polymers; Machines and installations for acid treatments and cleaning treatments; Machines and installations for galvanising; Vacuum installations
9
Electric apparatus and electric accessories for the circuit board and photovoltaic industries, for electroplating, silicon production, silane production and for the manufacture of circuit boards, solar cells and/or solar modules; Measuring machines; Printers and printing apparatus, in particular ink-jet printers and laser printers and parts therefor
11
Apparatus for heating and drying; Ovens and Diffusion furnaces, in particular furnaces for industrial use