7
Machines, installations and machine tools, in particular automated machines, installations and production lines; Machine parts, spare parts and accessories for machines, installations and machine tools; Transport installations; Handling machines and handling apparatus, in particular robots, manipulators and grabs; Transporters; Machines and installations for the production, coating and/or processing of materials, in particular for the manufacture and/or processing of flat substrates for the circuit board industry and the photovoltaic industry; Presses, in particular laminating presses for the manufacture of solar modules, circuit boards and smart cards; Machines and installations for the manufacture of chemical products, in particular for the manufacture of silicon and silanes; Machines and installations for coating and/or surface treatment of materials, in particular semiconductor materials, glass, plastics or polymers; Machines and installations for acid treatments and cleaning treatments; Machines and installations for galvanising; Vacuum installations
9
Electric apparatus and electric accessories for the circuit board and photovoltaic industries, for electroplating, silicon production, silane production and for the manufacture of circuit boards, solar cells and/or solar modules; Data-processing equipment and computers; Printers and printing apparatus, in particular ink-jet printers and laser printers and parts therefor; Software, in particular operating software, all the aforesaid goods being solely for machines and installations for the circuit board and photovoltaic industries, for electroplating, silicon production, silane production and for the manufacture of circuit boards, solar cells and/or solar modules
11
Apparatus for heating and drying; Ovens and Diffusion furnaces, in particular furnaces for industrial use