9
Hardware and software for operating apparatus for the thermal and plasma treatment of surfaces and objects, or for thermal and plasma treatment processes for modifying surfaces, in particular semiconductor surfaces; Scientific, surveying, electric, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments (included in class 9), all in particular for the manufacture and processing of semiconductors and solar cells, and the raw materials therefor; Apparatus and instruments for conducting, switching, transforming, accumulating, regulating or controlling electricity, all in particular for the manufacture and processing of semiconductors and solar cells, and the raw materials therefor
37
Construction, maintenance and repair of machines and parts therefor, for the thermal and plasma treatment of substrates, semiconductor substrates, silicon wafers and wafers, in particular in a vacuum, for semiconductor chip and solar cell manufacturing; Machines for the transport of semiconductors; Machines and installations mainly consisting thereof, for the surface treatment of semiconductors; Machines and installations mainly consisting thereof, for etching semiconductor surfaces, in particular in a vacuum (including ALD and CVD processes); Machines for transporting or processing or providing flat panels; Semiconductors and compound semiconductors; Hardware and software for operating apparatus for the thermal and plasma treatment of surfaces and objects, or for thermal and plasma treatment processes for modifying surfaces, in particular semiconductor surfaces; Scientific, surveying, electric, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and/or teaching apparatus and instruments, all in particular for the manufacture and processing of semiconductors and solar cells, and the raw materials therefor; Apparatus and instruments for conducting, switching, transforming, accumulating, regulating or controlling electricity, all in particular for the manufacture and processing of semiconductors and solar cells, and the raw materials therefor; Apparatus and equipment and installations consisting thereof, for the thermal and plasma treatment of substrates, semiconductor substrates, silicon wafers and wafers, for semiconductor chip manufacturing; Shock heating apparatus for semiconductor treatment and manufacturing, in particular with a base of halogen lamps and arc lamps; Epitaxial reactors
40
Treatment of materials
42
Technical development of machines and parts therefor, for the thermal and plasma treatment of substrates, semiconductor substrates, silicon wafers and wafers, in particular in a vacuum, for semiconductor chip and solar cell manufacturing; Machines for the transport of semiconductors; Machines and installations mainly consisting thereof, for the surface treatment of semiconductors; Machines and installations mainly consisting thereof, for etching semiconductor surfaces, in particular in a vacuum (including ALD and CVD processes); Machines for transporting or processing or providing flat panels; Semiconductors and compound semiconductors; Hardware and software for operating apparatus for the thermal and plasma treatment of surfaces and objects, or for thermal and plasma treatment processes for modifying surfaces, in particular semiconductor surfaces; Scientific, surveying, electric, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and/or teaching apparatus and instruments, all in particular for the manufacture and processing of semiconductors and solar cells, and the raw materials therefor; Apparatus and instruments for conducting, switching, transforming, accumulating, regulating or controlling electricity, all in particular for the manufacture and processing of semiconductors and solar cells, and the raw materials therefor; Apparatus and equipment and installations consisting thereof, for the thermal and plasma treatment of substrates, semiconductor substrates, silicon wafers and wafers, for semiconductor chip manufacturing; Shock heating apparatus for semiconductor treatment and manufacturing, in particular with a base of halogen lamps and arc lamps; Epitaxial reactors