7
Equipment and systems comprised of machinery for making solar instruments and materials, namely, for making photovoltaic solar generators, for making photovoltaic solar cells, for making inverters, for making direct current cables and for making solar radiation-related monitoring and tracking systems, all for the construction and manufacturing of machines and instruments for the generation and transformation of electricity from solar energy; Semiconductor wafer processing equipment, and components, namely; epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, and chemical mechanical polishers; and operational software sold as a component of the foregoing; all for the processing and production of semiconductor substrates, thin films, silicon discs and wafers; equipment and systems comprised of machinery for making flat panel displays; all of the above exclusively for use in connection with photovoltaic production and photovoltaic or solar cells and panels
9
Solar cells; electronic sensors for measuring solar radiation; photovoltaic cells and modules; flat panel displays; all of the above exclusively for use in connection with photovoltaic production and photovoltaic or solar cells and panels
37
Maintenance and repair of semiconductor processing and production equipment; maintenance and repair of solar production equipment