7
Machines, apparatus and instruments for manufacturing semiconductors; machines, apparatus and instruments for use in the manufacture of thin film transistors; machines, apparatus and instruments for use in the manufacture of liquid crystal displays; thin film processing equipment, wafer processing equipment, etch technology processing equipment, deposition technology processing equipment, all for use in the manufacture and processing of computer hardware, computer software and computer components including semiconductors, integrated circuits and flat panel displays; chemical mechanical polishers; parts, fittings, accessories and components for all the aforesaid goods
9
Semiconductors and apparatus and instruments incorporating semiconductors; semiconductor fabrication apparatus and instruments; semiconductor wafer processing equipment, apparatus, instruments and components; epitaxial reactors, chemical vapour deposition reactors, physical vapour deposition reactors, plasma etchers, ion implanters, supporting frames therefor and components thereof; parts, fittings and accessories for all the aforesaid goods; and computer programs for use with all the aforesaid goods; none of the aforesaid goods being for lighting purposes
37
Installation, maintenance and repair of machines, apparatus and instruments for use in the manufacture of electronic apparatus and instruments; of machines, apparatus and instruments for manufacturing semiconductors, thin film transistors and liquid crystal displays; of scientific, electric and electronic apparatus and instruments; of semiconductor fabrication apparatus and instruments; of semiconductor wafer processing equipment, apparatus and instruments; of epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, supporting frames and of components thereof; of chemical mechanical polishers; of thin film transistors, thin film processing equipment and liquid crystal displays; of parts, fittings and accessories for all aforesaid equipment, apparatus and instruments